SEMICONDUCTOR DIVISION

System Installation & Hook-up Stabilizing

사업현황

Lam System Overhaul

  • Polymer Deposition 및 오염으로 인한 Particle Source 발생
  • 설비 Overhaul을 통한 Particle Issue를 최소화하여 정지 Loss 감소
  • 정지 Loss를 감소하여 생산성 향상에 기여

CLUSTER TOOL SYSTEM

VTM Robot

Vacuum Transfer Module

EFEM

ATM Robot

Load Port Module

Aligner

Gas Box Overhaul

VTM Overhaul

EFEM Overhaul

PM Overhaul

제품 현황

Equipment Setup

Installation of New System for Customer

  • Etch and Deposition Systems Hook-up / Hardware Set-up
  • Production of Non-standard Requested Parts and Materials

Relocatione for Customer Systems

  • Etch and Deposition Customer Systems Hook-up / Hardware Set-up

Setup Parts, Repair, NSR and Overhaul

Repair

  • Brooks/TDK
  • Check and Replace Cylinders & Sensor
  • Integrated function check 

NSR Modify and Production

  • Load Port N2, Gas Box, AFVI Gas line
  • EFFM용 ATM Port, Fore Line Bellows
  • Circuit Bracket Cover
  • Power Cable

EFEM & Load Port Overhaul

  • Eliminate contamination in FAB
  • Inside EFEM & Load Port cleaning
  • Improve productivity

System Overhaul

  • Entire system for Re-location Tool
  • Section part in FAB for running Tool

Partnership

We've worked with some of the biggest companies

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